About
The Cleanroom Research and Prototyping Facility at KSU is a cross-disciplinary center. The facility offers an excellent location for students, various companies and technical organizations to carryout research activities. The facility consists of tools for device fabrication (e.g. liquid crystal display) with a range of equipment, such as spin reactive ion etch, metal evaporation systems (DC and RF sputter, e-beam, thermal), wet chemical stations, photolithography, and surface analysis tools. It is physically situated at the LCM building. For access to the facility, an external user agreement must be completed and approved. Membership to the Industrial Partnership Program allows free access after user access training is completed.